RF Generators are robust, efficient & smart are equipped with micro controllers to safely, reliabily control them.
The vast majority of all radio frequency ignited plasma applications work at 13.56MHz. Sometimes higher or lower frequencies can bring advantages for the plasma process. Therefore we offer generators that work on one of the other ISM frequencies (industrial, scientific, medical): 27.12MHz and 40.68MHz but even above and below. The modular design allows to change the working frequency without much effort.
The MatchingCube is a matching network in L configuration. It is suitable for use with capacitively coupled plasma (CCP) and inductively coupled plasma (ICP).
Both capacitances of both capacitors can be varied with step motors. If it is not possible to find a matching condition the inductance can be modified. Therefore windings can be removed or added. Here winding are not just shortened or left open because this would still affect the matching condition.
The MatchingCube measures the at its output applied dc voltage: the DC bias. Its value can be requested via the remote control interface.
Barthel amplifier stages employ state of the art LDMOS technology. This way the amplifiers are rugged and can handle reflected power due to mismatch conditions. All important parameters are monitored with a micro controller that also protects the amplifier against improper operating conditions. Modern components together with intelligent software garantee a high reliability of the amplifiers for spectroscopic & particle accelaration application.
